For VLSI fabrication silicon is preferred compared to Germanium for the following reason? All Questions › Category: VLSI CMOS › For VLSI fabrication silicon is preferred compared to Germanium for the following reason? 0 Vote Up Vote Down Chetan Shidling Staff asked 5 years ago Options: a. Supports building compact devices. b. Exhibits stability of operation for a wider temp range. c. Lower leakage currents, Buffer noise immunity. d. Complex process technology.