Self-Aligned silicide process is used to ____ and ____? All Questions › Category: VLSI CMOS › Self-Aligned silicide process is used to ____ and ____? 0 Vote Up Vote Down Chetan Shidling Staff asked 5 years ago Options: a. Lower the sheet resistance of S/D b. Increase the sheet resistance of S/D c. Increase the sheet resistance the poly-gate d. Lower the sheet resistance the poly-gate