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Sheet Resistance in CMOS VLSI means:
- The active devices of MOS technology having been dealt with in some measure, it is now appropriate to consider their interconnection as circuits.
- The ‘wiring-up’ of circuits takes place through the various conductive layers which are produced by the MOS processing
- It is therefore necessary to be aware of the resistive and capacitive characteristics of each layer.
- Concepts such as sheet resistance Rs and a standard unit of capacitance, help greatly in evaluating the effects of wiring and input and output capacitances.