What is the primary motivation for replacing planar MOSFETs with FinFETs? All Questions › Category: VLSI CMOS › What is the primary motivation for replacing planar MOSFETs with FinFETs? 4 Vote Up Vote Down Chetan Shidling Staff asked 5 years ago Options: a. To reduce parasitic capacitance. b. To lower series resistance. c. To improve gate control over the channel and reduce threshold voltage roll-off. d. To lower the noise figure.